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Phase Controlled Interference lithography: A dynamic tool for large-area fabrication of nano-photonic structures

机译:相控干涉光刻:用于大面积制造纳米光子结构的动态工具

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The field of nanophotonics is a fascinating branch of optics that has shown a whole new-perspective of light-matter interaction, or more specifically the controlling or 'molding the flow' of light. Periodic nanostructures in one, two, and three dimensions have been the active block of such light-manipulation, resulting in numerous applications and finally emerging as one of the interesting fields of the science community in the last decade. Such applications range from filtering, optical guiding, field enhancing, confinement/light-trapping optical computing, signal processing towards a whole set of parametric sensing that can affect the resonance mechanism associated with these nanophotonic structures. Although there are a series of fabrication approaches, the present review article covers the state of the art in 'phase-controlled interference-lithography' based fabrication technique for different application-oriented possibilities, utilizing the benefits of scalability and reconfigurability.
机译:纳米光子学领域是光学的一个引人入胜的分支,它显示了一个全新的视角,涉及光与物质的相互作用,或更具体地说,是控制或“塑造”光的流动。一维,二维和三维维的周期性纳米结构一直是这种光操纵的主要障碍,导致了许多应用,并最终成为近十年来科学界关注的领域之一。这样的应用范围从滤波,光导,场增强,限制/陷光光学计算,信号处理到可以影响与这些纳米光子结构相关的共振机制的整套参数感测。尽管有一系列制造方法,但本篇综述文章利用可伸缩性和可重新配置性的好处,介绍了基于“相控干涉光刻”的制造技术,以针对不同的面向应用的可能性提供了最新技术。

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