Performance of Coplanar Waveguides on Surface Passivated Highly Resistive Silicon Covered by Ferroelectric Thin Film

摘要

Coplanar waveguides (CPWs) on surface passivated highly resistive Si (HRS) covered by ferroelectric film are studied. The focus is on passivation techniques reducing losses caused by surface charge accumulation at the Si/SiO{sub}2 interface. Different passivation methods are considered, Ar-ion bombardment into the silicon substrate and deposition of poly-Si below the oxide layer. Both methods remove any bias-dependence and decrease the losses associated with surface charge accumulation. It is also concluded that the effect of passivation remains after pulsed laser deposition of a ferroelectric thin film.