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Argon ICP plasma torch at atmospheric pressure driven by a SiC based resonant converter operating in MHz range

机译:由工作在MHz范围内的SiC基谐振转换器驱动的常压氩ICP等离子炬

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In this work, the challenge of driving an Argon inductively coupled plasma (ICP) torch at atmospheric pressure, with a high-frequency resonant converter is approached. Based on wide bandgap semiconductor power devices, these converters reach efficiencies over 90% in MHz range for powers up to tens of kW. This makes the efficient power conversion in applications like plasma torches possible, which are typically driven by valve amplifiers with relatively low efficiencies. However, due to the strong impedance variations of ICP loads with power and frequency, special considerations must be taken for the design of such a system. FEM simulations of the torch were performed showing the expected impedance variations in range of 1 to 14MHz and 1 to 15kW. An experimental Argon torch prototype was built and driven by a Silicon Carbide (SiC) resonant converter operating at 3MHz. Impedance measurements were performed at different operating points and compared with simulation results. A global analysis of the whole system is included, showing the important considerations for understanding and designing such a system.
机译:在这项工作中,面临着用大气压谐振转换器在大气压下驱动氩气感应耦合等离子体(ICP)焊炬的挑战。这些转换器基于宽带隙半导体功率器件,在功率高达数十kW的情况下,在MHz范围内的效率达到90%以上。这使得在等离子炬等应用中实现高效的功率转换成为可能,这些应用通常由效率相对较低的阀门放大器驱动。但是,由于ICP负载随功率和频率的阻抗变化很大,因此在设计此类系统时必须特别注意。进行了割炬的FEM仿真,显示了预期的阻抗变化范围为1至14MHz和1至15kW。建立了一个实验性的氩炬原型,并由工作在3MHz的碳化硅(SiC)谐振转换器驱动。在不同的工作点进行阻抗测量,并将其与仿真结果进行比较。包括对整个系统的全局分析,显示了理解和设计这样的系统的重要考虑因素。

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