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Low frequency plasma spray method in which a stable plasma is created by operating a spray gun at less than 1 MHz in a mixture of argon and helium gas
Low frequency plasma spray method in which a stable plasma is created by operating a spray gun at less than 1 MHz in a mixture of argon and helium gas
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机译:低频等离子喷涂方法,其中通过在小于1 MHz的氩气和氦气混合物中操作喷枪来产生稳定的等离子体
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摘要
A low frequency RF plasma spray deposition method is provided, which is especially effective in reducing losses and improving particle heating. In one aspect of the invention, an RF plasma gun is operated in the frequency range below 1 MHz and an argon-helium mixture to which a third component, such as hydrogen, can also be admixed, is substituted for the standard argon-hydrogen mixture used at frequencies above 2 MHz. In another aspect of the invention, a RF plasma gun is operated in the frequency range of 400-500 kHz and specific start up and operating procedures and conditions are set forth for successful deposition of titanium and refractory metal alloys.
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