Wideband Air-Coupled CMUT Arrays for Acoustic Micro-Tapping

摘要

This paper presents a 32-element one-dimensional air-coupled capacitive micromachined ultrasonic transducer (CMUT) array designed to be part of a non-contact elastography system. To achieve the required bandwidth in air, staggered cell sizes are used. The completed devices showed a surface pressure of 950 Pa at the center frequency of 1.45 MHz. The 3-dB, 6-dB, and 10-dB fractional bandwidths are 5%, 10%, and 12.8%.