Development and Validation of a Novel Reliable Method for Wet Testing on Biochemical Chip

摘要

The Bio-MEMS (micro-electromechanical systems) are the major field of the biomedical chips. Many Bio-MEMS chips are worked in the water-related systems. So far except for the general chip probing (dry test), the latter testing can’t be able under the mass-production testing. The testing coverage in the Bio-MEMS and the ISFET (ion-sensitive field-effect transistor) still stays low and eventually lead to the low yield of the end product. This present situation is not able to meet the market mass-production requirement. Moreover, some chips like ISFET chips even are needed to immerse in solution during the process. However, the immersed testing systems are difficult to apply to mass production. Therefore, we had developed a validated novel dispensed method which was easier to be introduced to mass production. In the experiment of chip sensitivity, the testing results from both of the novel dispensed method and the immersed method showed the high accuracy and precision. The possible contamination of the novel dispensed method was further examined. The results showed that there were no effects during every testing process in this novel dispensed method. Besides, this novel dispensed method can be applied to the ISFET with different ions (H+, Na+ and K+), even the ISFET from the different companies. As above-mentioned, these experimental results showed the novel dispensed method can be available and potential on testing. And this method can be applied to most of the biomedical chips in the phase of foundry test.