Mass spectrometric analysis of one-time tube sealing and exhausting of 72.5kV vacuum interrupter

摘要

In this paper, one-time tube sealing and exhausting of 72.5kV ceramic vacuum interrupter is studied. The QMG220 quadrupole mass spectrometer was used to detect and record the residual gas in the 72.5kV vacuum interrupter during the whole process of sealing. By analyzing the rule of the exhaust gas in the process of baking, the kinds of residual gas and the partial pressure of the residual gas in the product are obtained. Through experimental analysis, the sealing and discharging process of 72.5kV vacuum interrupter is optimized, and establish the process curve of temperature rise, heat preservation and temperature drop for one-time tube sealing and exhausting of 72.5kV ceramic vacuum interrupter. The results of mass spectrum analysis show that the residual gases in 72.5kV vacuum interrupter are mainly H2, H2O, CO and CO2.