Optical Frequency Comb Generation using Low Stress Reactive Sputtered Silicon Nitride Waveguides

摘要

We demonstrate fully CMOS-compatible anomalous dispersive SiN microring resonators with an intrinsic Q factor of 6.6 × 10⁵ based on reactive sputtering SiN, yielding in a 250 nm wide modulation-instability frequency comb.