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Rate controlled sintering: A novel approach to improve quality and yield of die-attach interconnects

机译:速率控制烧结:一种提高芯片连接互连质量和良率的新颖方法

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Silver (or copper) sintering is nowadays the best choice for power electronics systems with high requirements on reliability, lifetime and application temperature. Especially SiC power modules can only achieve a peak performance together with sintered interconnects. Due to the higher melting temperature and better mechanical properties of silver or copper compared to soft-solder alloys, sintering is used as interconnect material in power modules. But the sintering process itself requires a high pressure up to 30 MPa onto the devices and the process itself is more cost-intensive. To achieve an economical process and make sintering worthwhile to invest, a high yield as a result of a stable process is needed. The idea of rate-controlled sintering (RCS) is a novel approach to make the sintering process robust and profitable. It improves the mechanical properties of sintered die-attach interconnects and decrease their deviation by using vacuum and nitrogen to control the different stages of the sintering reaction. Within this paper the mechanisms of sintering will be introduced, on which the idea of RCS is founded on. A case-study will be presented to demonstrate how rate-controlled sintering works, how it can improve the shear-values of die-attaches and lower die shear deviation.
机译:如今,银(或铜)烧结是对可靠性,寿命和应用温度有很高要求的电力电子系统的最佳选择。尤其是SiC功率模块与烧结互连一起只能实现最高性能。与软焊合金相比,由于银或铜的熔化温度更高且机械性能更好,因此烧结被用作功率模块中的互连材料。但是烧结过程本身需要在设备上施加高达30 MPa的高压,并且过程本身的成本更高。为了实现经济的工艺并值得进行烧结投资,需要稳定工艺带来的高产量。速率控制烧结(RCS)的思想是使烧结过程稳定且有利可图的新颖方法。它通过使用真空和氮气来控制烧结反应的不同阶段,从而改善了烧结的模片连接互连的机械性能,并降低了它们的偏差。在本文中,将介绍烧结机理,并以此为基础建立了RCS的思想。将进行案例研究,以说明速率控制的烧结如何工作,如何改善模头附着的剪切值和降低模头剪切偏差。

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