An Ultracompact Butterworth Low-Pass Filter Based on Vertical Spiral TSV Inductor

摘要

In this paper, an ultracompact Butterworth low-pass filter (LPF) with area of 0.003 mm² is proposed based on through-silicon-via (TSV) technology. The equivalent circuit model of the proposed LPF is developed and validated by the full-wave electromagnetic simulator such as HFSS. The proposed LPF exhibits compact size and superior filtering characteristics with respect to the existing LPF.