Fano Resonance in Deuterated Silicon Nitride Based on Fabry-Perot Cavity Coupled Microring Resonator

摘要

We demonstrate Fano resonance in shallow-etching grating-based Fabry-Perot (FP) cavity coupled microring resonator on a deuterated silicon nitride platform. The measured maximal slope rate (SR) of single Fano resonance is 1542.2 dBm. The results are important for many different photonics applications.