Optical Micro-ring Resonator for Detection of Carbon Dioxide Gas

摘要

A simulation model of a polymer clad micro-ring resonator gas sensor is proposed. The designed sensor detects carbon dioxide gas. Ring resonator of 11 μm radius is designed with strip waveguide on SOI substrate. Sensitivity of the sensor is calculated and ppm levels are validated with an existing fabricated sensor. The resonant wavelength shift is observed as 0.96 pm with the designed specifications wherein the range of ppm levels is 200-500. Based on the wavelength shifts, the ppm levels are validated with the existing fabricated sensor.