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Microwave bolometers based on carbon nanotube thin films and CVD-grown graphene

机译:基于碳纳米管薄膜和CVD生长的石墨烯的微波辐射热计

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We have investigated microwave power detection based from carbon nanotube (CNT) thin films and chemical vapor deposition (CVD) grown graphene. Our experiments indicate that power detection from the CNT devices is primarily due to bolometric mechanisms. While, power detection from the graphene devices is primarily due to signal rectification. Both enabling materials are relatively inexpensive and easily blanketed on a variety of substrates-enabling low-cost/disposable, surface-conformal power sensors for wideband spectrum sensing applications. However, it is significantly less challenging to pattern and integrate CNT thin films than it is to do the same with graphene. CNT thin film and graphene power detectors were realized by fabricating metallic Corbino disc test structures over these enabling materials. Such test structures are convenient for on-wafer characterization with ground-signal probes. The CNT devices were also evaluated with transient current-versus-voltage traces and microwave reflection spectroscopy to respectively measure thermal time constants and values of complex conductivity. The bolometer performance of these devices was gauged in terms of power detection sensitivity, noise equivalent power, and dynamic range. The measurements were performed with 915 MHz test signals and yielded sensitivities as high as 0.36 mV/mW at room temperature and 2.3 mV/mW when cooled with liquid nitrogen. Similarly, graphene Corbino disc test structures were characterized with 433.92 MHz test signals and yielded power detection sensitivities of 3.25 mV/mW (at room temperature) and 5.43 mV/mW (at 80 K). These devices feature gate control over the channel conductance, which contributed a frequency-limiting parasitic capacitance. Our investigations revealed that rectification, due to characteristic nonlinear current versus voltage behavior, was more prevalent in the graphene than bolometric detection, due to Joule heating.
机译:我们已经研究了基于碳纳米管(CNT)薄膜和化学气相沉积(CVD)生长的石墨烯的微波功率检测。我们的实验表明,从CNT设备进行功率检测主要是由于辐射热测定机制。同时,来自石墨烯器件的功率检测主要归​​因于信号整流。两种使能材料都相对便宜,并且易于覆盖在各种基板上,从而为宽带频谱感测应用提供了低成本/一次性,表面保形的功率传感器。但是,对CNT薄膜进行图案化和集成要比对石墨烯进行相同的挑战要少得多。 CNT薄膜和石墨烯功率检测器是通过在这些使能材料上制造金属Corbino圆盘测试结构来实现的。这样的测试结构便于通过地面信号探针进行晶圆上的表征。还用瞬态电流对电压轨迹和微波反射光谱法对CNT器件进行了评估,以分别测量热时间常数和复电导率值。这些器件的辐射热测量性能根据功率检测灵敏度,噪声等效功率和动态范围进行了评估。使用915 MHz测试信号进行测量,室温下灵敏度高达0.36 mV / mW,液氮冷却时灵敏度高达2.3 mV / mW。同样,石墨烯Corbino圆盘测试结构的特征是具有433.92 MHz的测试信号,其功率检测灵敏度为3.25 mV / mW(在室温下)和5.43 mV / mW(在80 K下)。这些器件具有对通道电导的栅极控制,这有助于限制频率的寄生电容。我们的研究表明,由于焦耳加热,由于特征性的非线性电流对电压行为的影响,石墨烯中的整流作用比辐射热检测更为普遍。

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