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Spectral performance and durability of dual-band infrared antireflection coatings on 3rd Gen lens substrates

机译:第三代透镜基材上的双波段红外减反射膜的光谱性能和耐久性

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Dual-band infrared optical systems require complex designs to meet their optical and thermal requirements. This complexity involves an increase in the number of elements and, typically, a greater variety of substrate materials. Many of the elements are lenses, therefore requiring the maintenance of coating thickness uniformity and durability over curved surfaces. Coating thickness uniformity can be predicted using commercially available modeling software that takes into consideration the locations of sources, monitors, substrates and any motion of the parts during deposition. The coating chamber configuration can then be optimized for thickness uniformity. Coating environmental durability is more difficult to predict, however. It is commonly accepted that there is a correlation between the coating deposition angle, the porosity of the coating and its durability. The durability of a coating deposited on flat witnesses is not necessarily representative of that of the coating deposited over the surface of a curved lens. Therefore, the deposition angle distribution must also be taken into consideration when optimizing for coating uniformity. We discuss the optimization of a coating chamber configuration for the challenging geometry of a 6" diameter lens with a 6" radius of curvature. The configuration is optimized for both thickness uniformity and deposition angle distribution. Coating uniformity and durability are measured on a monolithic lens substrate as well as on witnesses arrayed in surrogate tooling simulating the lens surface. The coating durability on the witnesses and full lens are analyzed with respect to modelled uniformity and deposition angle distributions.
机译:双频红外光学系统需要复杂的设计以满足其光学和热要求。这种复杂性涉及增加元素的数量,并且通常是更各种衬底材料。许多元件是透镜,因此需要维持涂覆厚度均匀性和耐用性在弯曲的表面上。可以使用商业上可获得的建模软件预测涂层厚度均匀性,该软件考虑到沉积期间部件的源极,监测器,基板的位置和任何运动的位置。然后可以优化涂层室构造以厚度均匀性。然而,涂层环境耐久性更难以预测。通常接受涂层沉积角与涂层的孔隙率和其耐久性之间存在相关性。沉积在扁平证人上的涂层的耐久性不一定代表沉积在弯曲透镜表面上的涂层的耐料性。因此,在优化涂覆均匀性时,还必须考虑沉积角度分布。我们讨论了具有6“直径透镜的挑战几何形状的涂布室构造的优化,其具有6”曲率半径。该配置针对厚度均匀性和沉积角分布进行了优化。在整体透镜基板以及在模拟镜片表面的替代工具中排列的证人测量涂层均匀性和耐久性。针对模型均匀性和沉积角分布分析证人和全镜头上的涂层耐久性。

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