A REVIEW OF SIMULATION-OPTIMIZATION METHODS WITH APPLICATIONS TO SEMICONDUCTOR OPERATIONAL PROBLEMS

摘要

Recent advances in simulation optimization (SO) research and explosive growth in computing power have made it possible to optimize complex manufacturing system problems. Semiconductor manufacturing is known as one of the most complex manufacturing systems. Based on a review of literature in the field of semiconductor manufacturing operational and planning problems, there is little reference to SO methods, an approach that has many advantages over other solution approaches. In this paper, we first distinguish between different users of SO then consider different approaches of SO applied to semiconductor and other manufacturing problems. The article then describes the main operational and planning issues in semiconductor manufacturing drawing actively from a Bosch fab, which could be addressed using SO. Finally, we attempt to provide insights on how SO can be applied to these problems.