Effect of Electrode Configurations on the Q-Factor and Spurious Modes for a Doubly Rotated Contoured Quartz Resonator

摘要

One of the important parameters that contribute to the quartz pressure sensor excellent stability at high temperature and pressure is the high material Q-factor of crystalline quartz. The next generation dual-mode SBTC-cut quartz-based pressure sensor was recently developed to target a higher-pressure range of 210 MPa psi and temperatures up to 200 °C. The objective of this paper was to modify electrode thickness and shape to maximize the resonator Q of the B-mode after sealing and increase the frequency separation of the unwanted anharmonic overtones to avoid activity dips over the operating pressure and temperature ranges. This paper describes a method for calculating the Q-factor, investigate different electrode design configurations and provide recommendations to improve the B-mode Q-factor value.