Improvement of crystallinity and perpendicular magnetic characteristics of ferro-Co{sub}77Cr{sub}20Ta{sub}3/PARA-Co{sub}65Cr{sub}35 bilayered films

摘要

Co-Cr thin films with voidless microstructure and nm-size magnetic zones have been already deposited. Improvement of the insufficient perpendicular magnetic anisotropy of the initial growth region is important subject for the fabrication of perpendicular magnetic recording media. The paramagnetic Co-Cr thin films are expected as a seed layer to promote epitaxial growth of a ferromagnetic Co-Cr recording layer deposited on it. However, crystallite orientation of the paramagnetic Co-Cr seed layer became more faint with increasing the substrate temperature Ts above 200°C. Optimization of Ts for the seed layer seems to be useful to improve crystallographic and magnetic characteristics of the recording layer deposited on it. In this study, the structure and properties of Co{sub}77Cr{sub}20Ta{sub}3/Co{sub}65Cr{sub}35 bilayered films with excellent crystallite orientation and high perpendicular coercivity Hc{sub}⊥ were adjusted by controlling Ts for the seed and recording layers independently.