High-Speed High/Low Pulse Operation by Deadbeat Control Considering Control Delay in Three-Phase Interleaved DC/DC Converter

摘要

In recent years, the pulse operation function is often used in the film formation process and the semiconductor manufacturing process. The High/Low pulse operation is also used and attracting attention. When High/Low pulse operation is performed in the DC/DC converter section of the RF generator using a Class-D RF amplifier, fast control responses of the DC/DC converter are required. Therefore, three-phase interleave of circuit and deadbeat control were applied. However, along with faster control, the stability of the control is adversely affected by delay time including the calculation delay and the detection delay of feedback value. Therefore, the control equation of the deadbeat control with considering the delay time was derived. In addition, I_C deadbeat control using capacitor current which could be detected at high speed was proposed. The effectiveness was confirmed by the simulations and experiments. The experimental results showed the high-speed transition time of 6.6 μs in the High/Low pulse operation of 280V/70V.