Enhanced Silicon photonics platform: towards low energy consumption of optical transceivers for datacenter communications.

摘要

We introduce our 200 mm Si-SiN photonic platform targeting energy-efficient optical transceivers. We present the fabrication process and wafer level characterizations in the O-band of a temperature quasi-insensitive SiN multiplexer as well as hybrid Si-SiN grating fiber coupler and Si-SiN interlayer transition.