400G Multi-Mode and Single-Mode Optical Transmitter Realized by Hybrid-Integrated Silicon Interposer for Data Center Application

摘要

We experimentally demonstrated both 400G multimode (MM) and single-mode (SM) optical engines based on Silicon interposer to hybrid integrate laser dice, optics, and fiber arrays. The interposer realized by Silicon bulk micro-machining makes the engine very compact and easily assembled by the built-in Silicon precision. Clear optical eyes with TDECQ of 1.7dB and of 2.7 dB are obtained for 50Gb/s VCSEL in MM optical engine and 100Gb/s EML in SM one, respectively.