Estimate on CO{sub}2 Emissions Reduction Effects Achieved by the Adoption of a Water Spray Humidification System to Clean Rooms

摘要

We proposed water spray humidification in an indoor system for clean rooms used for the production of semiconductors and FPDs, and calculated the energy-saving effect and CO{sub}2 emission reduction effect of this system. As a result of estimate on annual energy consumption by air conditioning at model semiconductor factory, this system can be reduced heating load of 76% and CO{sub}2 emission of 0.23 ton-CO{sub}2/Year per volume of outside air of 1m{sup}3/min.