Analysis of the front-end wet strip efficiency performance for productivity

摘要

With the ever-increasing price erosion of wafers and the variation of product mix, we are faced with the challenge of increasing our capacity through productivity improvement and fab expansion. Our priority is to first optimize the efficiency of critical tools in order to minimize investment cost in expansion. In this study, we focused on the efficiency improvement for the wet benches through the adoption of an enhanced dispatching rule. The dispatching rule attempts to minimize efficiency loss. Using simulation, we observed that it improved the capacity by 8%. Our model managed to achieve an accuracy of at least 95%.