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Direct Laser Writing of Polymer Micro-ring Resonator Ultrasonic Sensors

机译:聚合物微环谐振超声传感器的直接激光写入

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摘要

With the development of photoacoustic technology in recent years, ultrasound-related sensors play a vital role in a number of areas ranging from scientific research to nondestructive testing. Compared with the traditional PZT transducer as ultrasonic sensors, novel ultrasonic sensors based on optical methods such as micro-ring resonators have gained increasing attention. The total internal reflection of the light along the cavity results in light propagating in microcavities as whispering gallery modes (WGMs), which are extremely sensitive to change in the radius and refractive index of the cavity induced by ultrasound strain field. In this work, we present a polymer optical micro-ring resonator based ultrasonic sensor fabricated by direct laser writing optical lithography. The design consists of a single micro-ring and a straight tapered waveguide that can be directly coupled by single mode fibers (SMFs). The design and fabrication of the printed polymer resonator have been optimized to provide broad bandwidth and high optical quality factor to ensure high detection sensitivity. The experiments demonstrate the potential of the polymer micro-ring resonator to works as a high-performance ultrasonic sensor.
机译:近年来,随着光声技术的发展,与超声波相关的传感器在从科学研究到无损检测的许多领域中都发挥着至关重要的作用。与作为超声波传感器的传统PZT换能器相比,基于光学方法的新型超声波传感器(如微环谐振器)已受到越来越多的关注。沿着空腔的光的全内反射会导致光在微腔中传播,如耳语回廊模式(WGM),它对超声应变场引起的空腔的半径和折射率变化极为敏感。在这项工作中,我们提出了一种通过直接激光写入光刻技术制造的基于聚合物光学微环谐振器的超声传感器。该设计包含一个微环和一个直锥形波导,可以通过单模光纤(SMF)直接耦合。已对印刷聚合物谐振器的设计和制造进行了优化,以提供宽带宽和高光学品质因数,以确保高检测灵敏度。实验证明了聚合物微环谐振器作为高性能超声传感器的潜力。

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