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Direct Laser Writing of Polymer Micro-ring Resonator Ultrasonic Sensors

机译:聚合物微环谐振器超声波传感器的直接激光写入

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摘要

With the development of photoacoustic technology in recent years, ultrasound-related sensors play a vital role in a number of areas ranging from scientific research to nondestructive testing. Compared with the traditional PZT transducer as ultrasonic sensors, novel ultrasonic sensors based on optical methods such as micro-ring resonators have gained increasing attention. The total internal reflection of the light along the cavity results in light propagating in microcavities as whispering gallery modes (WGMs), which are extremely sensitive to change in the radius and refractive index of the cavity induced by ultrasound strain field. In this work, we present a polymer optical micro-ring resonator based ultrasonic sensor fabricated by direct laser writing optical lithography. The design consists of a single micro-ring and a straight tapered waveguide that can be directly coupled by single mode fibers (SMFs). The design and fabrication of the printed polymer resonator have been optimized to provide broad bandwidth and high optical quality factor to ensure high detection sensitivity. The experiments demonstrate the potential of the polymer micro-ring resonator to works as a high-performance ultrasonic sensor.
机译:随着近年来光声技术的发展,超声波相关的传感器在许多从科学研究到无损检测的领域发挥着重要作用。与传统的PZT换能器相比,作为超声传感器,基于微环谐振器等光学方法的新型超声波传感器获得了越来越长的关注。沿着腔的光的总内部反射导致在微腔中传播的光在微腔中传播,作为耳语的廊道模式(WGM),这对超声菌场引起的腔的半径和折射率的变化非常敏感。在这项工作中,我们介绍了一种由直接激光书写光学光刻制造的基于聚合物光学微环谐振器的超声波传感器。该设计由单个微环和直锥形波导组成,可由单模纤维(SMF)直接耦合。印刷高分子谐振器的设计和制造已被优化,以提供广泛的带宽和高光学质量因子,以确保高检测灵敏度。实验证明了聚合物微环谐振器的电位,以作为高性能超声波传感器的作用。

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