High-Q tunable surface-mounted cavity resonator using RF MEMS fixed-fixed beams

摘要

This paper presents a 14 GHz high-Q (quality factor) tunable resonator using microelectromechanical system (MEMS) fixed-fixed beams. A copper surface mountable cavity has been designed and bonded on a fused silica substrate, on which are processed seven 800 μm long and 100 μm width gold fixed-fixed beams. The MEMS is located in the middle of the cavity, where the E-field of the TE₁₀₁ mode is maximum in order to ensure a wide tuning range. Electromagnetic simulation have been conducted and exhibits 8 % frequency shift from 13.05 GHz to 14.1 GHz with a continuous shift and an unloaded quality factor (Q_u) from 1376 to 1090.