Trial of applying the unbalance vibration compensator to axial position of the rotor with AMB

摘要

In manufacturing, turbo molecular pump (TMP) is widely employed. The rotor in the TMP is supported by the active magnetic bearing (AMB). When the rotor rotates, unbalanced vibration occurs. This vibration prevents the rotor from passing the critical speeds. As the suppression methods, Peak-of-gain control (PGC), Automatic balancing control (ABS) and Phase variable control are reported. However, these methods are applied to radial direction only of the rotor in spite of existing axial vibration which synchronizes with the rotational frequency. Then, the unbalance compensator is applied to axial direction.