Silicon on-chip ultracompact integrated sensor array based on high-Q photonic crystal nanobeam cavities with very large free spectral range

摘要

We present a novel method for multiplexed on-chip integrated sensor-array, which are based on ultracompact one-dimensional photonic-crystal nanobeam cavities with ultrahigh-Q and very large-free-spectral-range (LFSR, ~200nm). The high refractive-index sensitivities of 166.4nm/RIU can be achieved.