TM grating couplers for low-loss LPCVD based Si3N4 waveguide platform

机译：用于低损耗LPCVD的Si 3 N 4 波导平台的TM光栅耦合器

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We demonstrate TM grating couplers for LPCVD silicon nitride platform with coupling loss of 6.5dB at 1541nm and 1dB bandwidth of 55nm employing optical projection lithography for low-cost and mass manufacturing of photonic integrated circuits.

机译：我们演示了用于LPCVD氮化硅平台的TM光栅耦合器，该耦合器采用光学投影光刻技术在1541nm处的耦合损耗为6.5dB，在55nm处的1dB带宽为光子集成电路的低成本和批量生产。

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《Conference on Lasers and Electro-Optics》|2017年|1-1|共1页
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G. Dabos; A. Manolis; A. L. Giesecke; C. Porschatis; B. Chmielak; T. Wahlbrink; N. Pleros; D. Tsiokos;
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Optical waveguides; Couplings; Silicon nitride; Plasmons; Photonics; Silicon; Propagation losses;

机译：光波导;耦合;氮化硅;等离子;光子学;硅;传播损耗;

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5. TM grating couplers for low-loss LPCVD based Si3N4 waveguide platform [C] . G. Dabos, A. Manolis, A. L. Giesecke, Conference on Lasers and Electro-Optics . 2017

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TM grating couplers for low-loss LPCVD based Si3N4 waveguide platform

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