A new driving method for piezo deformable mirrors: open loop control and MOAO made easy

摘要

This paper presents the design and the realisation of a technique to attenuate the hysteresis nonlinear phenomenon of piezoelectric actuators. Piezoelectric actuator are widely utilised for deformable mirrors used for MOAO and power laser beam shaping techniques. The nonlinearities of piezo are usually iteratively compensated using closed-loop set-ups. In open-loop control, the hysteresis and the creep of the piezo cannot be corrected, thus this nonlinearities must be removed or at least minimised. The concept has been demonstrated on high displacement Amplified Piezoelectric Actuators (APA) mounted in a Fabry-Perot interferometer. The hysteresis attenuation technique aims to assist the Fabry-Perots nano-positioning control system to attain its main scientific specification. In such system, each APA has a maximum stroke of 270 μm within a 170 V (－20 V to ＋150 V) range and is used to position a high reflective mirror plate. The Fabry-Perots nano-positioning control system is specified to limit the APAs positioning steady-state noise to 3nm rms, but the hysteresis limits the positioning accuracy. In order to attenuate hysteresis, a hybrid amplifier circuit built with a high power operational amplifier has been designed and applied for each APA. The experiments results show that the hysteresis effect has almost been eliminated, and consequently the positioning steady-state noise can significantly been reduced. Because of the excellent results of this hybrid amplifier, a patent application has been introduced in June 12, 2015 under number N°1555381 and is being reviewed now.