LQG-based synchronization control of Fabry-Perot spectrometer using multiple piezoelectric actuators (PEAs)

摘要

In this paper, three piezoelectric actuators (PEAs) in parallel installation are utilized in the Fabry-Perot spectrometer for adjusting the optical lens at the nanometer level. Due to the mechanical coupling and uneven preloads to the actuators, the responses of each PEA is rather different, which causes unparallel movement of the positioning stage in the Fabry-Perot spectrometer leading to poor measurement results. Therefore, the controller is highly demanded to enable the synchronized motion of the three PEAs. To this end, the linear-quadratic-Gaussian (LQG) controller combining a synchronization control strategy is developed. The effectiveness of the proposed controller is validated via the experimental tests.