The microstructure measurement of surface defects of optical component based on digital image-plane holographic microscopy

摘要

In order to measure the three-dimensional microstructure of surface defects on optical component, a novel measuring method based on digital image-plane holographic microscopy (DIPHM) is proposed in this paper. The experimental system has been designed and built to measure the microstructure of optical component's surface defects. The object light wavefront can be reconstructed by using the algorithm based on the angular spectrum theory, and the technique of phase correction is contributive to eliminate the system error. There is a definite relationship between the object light wavefront and the surface topography, so the 3D microstructure of surface defects can be measured. This measuring technique is helpful to judge the damage degree of the optical component and analysis the influence of the surface defects, and it is of great significance to ensure the laser system security running.