Embedded flash technology for automotive applications

摘要

Higher fuel-efficient engine and advanced driver assistance system (ADAS) require the further progress of embedded Flash (eFlash) technology for the automotive microcontroller units (MCUs). Continuous evolution of eFlash has satisfied the automotive requirements for the excellent reliability with the lower failure ratio of single ppm level and the high performance under harsh operating condition. Especially our unique spilt-gate MONOS (SG-MONOS) has been leading the world's first most cutting-edge eFlash for automotive MCUs since 90nm process node and has been already scaled down to 28nm one, because of its excellent reliability and process scalability. In addition our gate polished structure for the low-profile SG-MONOS enables to implement high performance and power efficient high-K metal gate (HKMG) CMOS transistors, while the conventional stacked floating gate Flash can be hardly applied. As the convergence candidate of eFlash for automotive Flash MCUs, SG-MONOS can contribute to the realization of the future world's leading green vehicles and autonomous-driving era.