MEMS pressure sensors for high-temperature high-pressure downhole applications

摘要

This paper outlines the approach to realize a MEMS pressure sensor suitable for meeting the stringent requirements of sensing in a downhole environment reaching 175-oC temperature and 200-MPa pressure while maintaining an accuracy of better than 0.02% for an extended measurement period of several weeks during oil and gas exploration. A few sensing structures are proposed and strategies for their optimization are discussed for this unique application.