Validation of accuracy and repeatability of UltraSurf metrology on common optical shapes

摘要

Advancements in optical manufacturing technology allow optical designers to implement steep aspheric or high departure surfaces into their systems. Accurate metrology during the grinding and polishing stages of asphere manufacturing will reduce time and cost. Measuring these surfaces with common interferometers or profilometers can be difficult due to large surface slopes or unpolished surface texture. OptiPro has developed UltraSurf to qualify the form, figure, and thickness of steep aspheric and freeform optics. UltraSurf is a computer controlled, non-contact coordinate measuring machine. It incorporates five air-bearing axes, linear motors, high-resolution feedback, and a non-contact probe. The measuring probe is scanned over the optical surface while maintaining perpendicularity and a constant focal offset. There are multiple probe technologies available on UltraSurf, and each probe has strengths and weaknesses relative to the material properties, surface finish, and figure error of an optical component. Validation of the system accuracy, repeatability, and methodology must be performed to trust the measurement data. Form and figure maps of a flat, a sphere, and an asphere using UltraSurf will be presented with comparisons to interferometry. In addition, accuracy, repeatability, and machine qualification will be discussed.