Multiplex Acquisition Approach for High Speed 3D Measurements with a Chromatic Confocal Microscope

摘要

A technical realization of a multispectral camera is proposed, by multiplexing a light source with six different spectra. A monochrome line scan camera with six pixel rows is used as detector. The special feature of this acquisition approach is its high speed capability. The scan speed is as high as the frame rate of the line scan camera and not affected by the multiplexing. As application a chromatic confocal microscope was build up. From a data acquisition perspective up to 284 million 3D points per second can be measured. A real time signal processing is proposed, too.