The design of 2-D dynamic photoelectric microscope applied in the abbe comparator

摘要

High-precision line scale, as the benchmark of the dissemination of quantity in length measurement, is being widely used in processing and calibration of precision instruments. The key for tracing measurement of line scale templates is to achieve high-precision alignment of the linear ruler. In order to perform the traceable measurement of 2-D Line Scale templates, we designed a kind of 2-D dynamic photoelectric microscope that can realize high resolution aim at the crosswire. When the templates moves unidirectionally with uniform speed, the corresponding crosswire will be imaged in the two slits successively. Then the light signal is converted into an identical electrical signal by the photomultiplier tube. Finally using laser interferometer ambient parameter monitor and laser wavelength compensation , the high-precision calibration of 2-D line scale templates can be realized. The measurement uncertainty can reach U=(0.1+0.1 L)μm (k=3,L: m) .