Visual Detection Method for Installation Error of Grating Measurement System

摘要

In order to complete the detection of small displacements, the principle of grating diffraction interference is used to convert the displacement of the measured target into the change of the light and dark of the fringes after interference. The displacement information is estimated by detecting the change in light intensity. However, this method requires high optical path symmetry and complicated installation. In this regard, by modifying the optical path and using the principle of interference, this article enlarges and visualizes the installation error. Thereby reducing the complexity of installation and adjustment, and improving the accuracy of installation and adjustment.