Research on reducing carbon pollution of micro channel plate method of ultraviolet-ozone irradiation

摘要

In order to reduce carbon pollution of micro channel plate (MCP) caused ins sputtering process of ion barrier film, use principle of ultraviolet-ozone decomposition, then the oxygen has been flowed into ultraviolet-ozone decomposition instrument, and 4 pieces of MCP have been Irradiated 30 hours to decompose Carbon and organic. It is showed by testing and analysis after the test that the carbon pollution reduced significantly, and ion barrier film was not damage and electrode was not oxidative. Current gain increased 3.95% after this method finally.