energy harvesting; micromechanical devices; nondestructive testing; piezoelectric devices; piezoelectric thin films; vibrations; wireless sensor networks; Internet of Things; MEMS; NDT applications; advanced manufacturing process flow; autonomous wireless sensors; direct piezoelectric effect; electrical power; frequency 50 Hz to 75 Hz; mechanical vibrations; miniaturized piezoelectric based energy harvesting devices; piezoelectric films; power 100 muW; power sensing electronics; thinning process; wireless sensor network; Computer architecture; Energy harvesting; Frequency measurement; Micromechanical devices; Performance evaluation; Power generation; Vibrations; NDT; energy harvesting; piezoelectric;
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