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High-speed low-cost surface treatments using a novel atmospheric-pressure plasma source

机译:使用新型常压等离子体源的高速低成本表面处理

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The surface properties of materials used commercially are often more important to their function and marketability than their bulk properties and are determined by an extremely thin region that can be as small as a few atomic diameters. Plasma surface treatment is usually fast, affects about 10 nanometers of the very surface layer, and have many potential benefits including minimal waste and control of surface functionality. New plasma applications are continuously emerging in the vastly growing area of nanotechnology. In a contrast to common plasma applications for surface modifications of high-added value materials for microelectronics, medicine, etc. a novel type of atmospheric plasma source developed at CEPLANT research centre (www.ceplant.cz) makes possible low-cost inline treatment of a wide scale of standard flat and web materials. Advantageously in comparison to competitive plasma techniques this plasma source is capable of generating visually uniform “cold” high power-density diffuse plasmas in any working gas, including ambient air, pure atmospheric-pressure oxygen and hydrogen, without the use of expensive He or Ar. Very high plasma power densities achieved (∼100 W/cm) allows for short plasma exposure times on the order of 0.1 s and, consequently, high treatment speeds [1, 2]. The plasma source is technically simple, safe at the contact with human body and can be operated in humid and dusty environment.
机译:商业上使用的材料的表面特性通常对其功能和可销售性比其堆积性更重要,并且由极薄的区域确定,该极薄区域可以像少量原子直径一样小。等离子体表面处理通常快速,影响约10纳米的非常表面层,并且具有许多潜在的益处,包括最小的废物和对表面功能的控制。新的等离子体应用在纳米技术的巨大地区持续出现。与常见的等离子体应用用于微电子,医学等高附加值材料的表面修饰。一种在Caplant研究中心(www.ceplant.cz)开发的新型大气血浆源(www.ceplant.cz)的新型大气压等离子体源广泛的标准平板和网状材料。有利地与竞争性等离子体技术相比,该等离子体源能够在任何工作气体中产生视觉均匀的“冷”高功率密度漫反射等离子体,包括环境空气,纯大气压氧气和氢气,而不使用昂贵的HE或AR 。实现的非常高的等离子体功率密度(〜100W / cm)允许短等离子体暴露时间约为0.1秒,并且因此高处理速度[1,2]。等离子源在技术上简单,安全地与人体接触,并且可以在潮湿和尘土飞扬的环境中运行。

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