Electric discharges of different types as well as electron beams are now widely used for the modification of near-surface layers of various materials [1]. As is known, a volume discharge can be generated using inhomogeneous electric field in air at atmospheric pressure. For this purpose, high-voltage (∼100 kV) pulses of nanosecond duration are applied to a gas filled interelectrode gap. A specific feature of such discharges is the accompanying the formation of the supershort avalanches electron beams (SAEBs) and X-ray emission [2]. A runaway electron preionized diffuse discharge (REP DD) is easily realized in various gases and at different pressures [2, 3]. At the REP DD, the anode is influenced by the dense plasma of a dense nanosecond discharge with the specific input power up to hundreds of megawatt per a cubic centimeter, by the SAEB, shock wave and optical radiation from discharge plasma of various spectral ranges, including UV and VUV. This allows forecasting the REP DD application for modification and cleaning of metal surfaces in different technological processes [3, 4].
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