Reliability characterization of a soot particle sensor: Analysis of stress- and electromigration in thin-film platinum

摘要

In this work we present a systematic investigation of failure mechanisms for thin-film platinum heater structures and interdigitated electrodes as components of a resistive type soot particle sensor. We study stress-migration and electromigration and effects of their interaction. Lifetime determination and SEM imaging are applied for samples which have experienced different load conditions to quantitatively and qualitatively understand the phenomena. We use dedicated, application-related test structures to ensure that the results are transferable to sensor lifetime estimations.