TCAD-Spice Co-Simulation of Ferroelectric Capacitor as an Electrically Trimmable On-Chip Capacitor in Analog Circuit

摘要

In this paper, Ferroelectric Capacitor (FEC) is proposed as an electrically trimmable capacitor for integrated circuit applications and verified using TCAD-SPICE co-simulation. TCAD simulation is used to obtain the FEC capacitance by solving Landau-Khalatnikov (LK) Equation and Poisson Equation. TCAD mixed-mode simulation is used to study the stability of the circuit. FEC compact model is extracted and implemented in Verilog-A code. The FEC is then used in a single stage common source amplifier and, by changing the DC bias of the FEC from -5V to 0V, the 3dB bandwidth is shown to be trimmable electrically from 0.6GHz to 1.3GHz. The methodology also demonstrates the possibility of Design-Technology Co-Optimization (DTCO) of FEC in analog and RF circuits by using TCAD-SPICE co-simulation.