High-density data recording on the thin nanocomposite films by laser thermo-lithography

摘要

The method of high-density data recording by laser thermo-lithography with ion-beam etching was proposed. The nanocomposite films were created by the spin-coating method on basis of organic positive photoresist and added synthesized dyes characterized by absorption in the spectral region 390-410 nm and which are able to be evaporated by 405 nm laser radiation. The pits with 250 - 300 nm width were performed on the thin organic nanocomposite films by 405 nm laser beam focused by 0.85 NA lens. The organic nanocomposite film with obtained pits was used as a mask for reactive ion-beam etching of glass substrate. The 150 nm pits were performed on the substrate surface in the result of the laser thermo-lithography with ion-beam etching.