Finite element simulation of surface acoustic waves excited in barium-strontium titanate films fabricated on magnesium oxide substrate by interdigital transducers

摘要

In this paper, we present study on surface acoustic waves excited in barium - strontium titanate films fabricated on magnesium oxide substrate by interdigital transducers. The surface acoustic waves propagation was simulated by using COMSOL Multiphysics™. The presence of bias, since the oscillations are not considered as sagittal polarized, is the principal difference between considered problem and standard problem that implemented in many finite element packages. The calculations of mechanic displacement and electric field potential for the first Eigen frequencies for different planes are shown. The methods of modeling in COMSOL Multiphysics™ software package are presented in this paper can be used for calculations of other systems that have different complex configuration.