In this study, the structural stability of ultra-thin DLC films under heating was investigated experimentally. The thermal robustness of nanometer-thick DLC films for TAMR was demonstrated, and its damage mechanisms were elucidated by using CVD and FCVA DLC films. In addition, the refractivity of disk substrates with heated DLC thin films was also evaluated using a scanning micro-ellipsometer. It was suggested that this measurement system may be a very easy and effective way for evaluating the thermal stability of DLC films. The effect of heating duration on the thermal stability of DLC films was also investigated using this method, and it was also suggested that DLC thin films on the air bearing surface may be affected by laser heating because this surface may be heated for a significantly longer duration owing to the magnetic head read/write operation, whereas DLC thin films on the disk substrate may not be affected as severely by laser heating.
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