High-reliable high-power 266-nm UV beam generation by using high-quality uniform CLBO crystals with an all-solid-state laser

摘要

Summary form only given. High-power all-solid-state UV lasers are used for precise material processing applications in industrial fields with the potential advantage in the maintenance cost compared with other UV lasers. Industrial precise processing applications such as drilling on printed circuit board or cutting printed circuits require more than 10 W of UV powers at kHz-repetition. Authors have generated 266-nm UV power up to 20.5 W with the repetition rate of 10 kHz by fourth harmonic generation of an all-solid-state laser. However, the variation of UV powers with CsLiB/sub 6/O/sub 10/ (CLBO) crystals has not been discussed. We report on the high-reliable higher-power UV beam generation by using high-quality uniform CLBO crystals and a high-brightness high-power all-solid-state green laser.