Enhancing Q-factor using fractal electrodes in Film Bulk Acoustic Resonator for wireless applications

摘要

In this paper, we have proposed the fractal electrodes in Film Bulk Acoustic Resonator (FBAR) and studied its effects on resonance behavior. The performance parameters such as quality factor and operating frequency have been compared with FBAR with simple planar electrode. To study the effects of fractal geometries in FBAR electrodes, the FEM analysis has been carried out using commercially available CoventorWare? tool. In our study, we have observed that the quality factor of FBAR have been significantly enhanced by introducing specific fractal geometries in electrode. Details on the different fractal electrode geometries and their effects are presented and discussed.