Tunable stepped impedance resonator bandpass filter using ferroelectric materials

摘要

In this paper, a stepped impedance resonator (SIR) bandpass filter using BST thin film as a tunable device has been discussed. For the analysis of relative dielectric constant of BST thin films, the BST interdigital capacitor (IDC) is fabricated with finger’s width and gap of 10 µm and 5 µm, respectivelym and the capacitance of IDC is 0.951 pF and the relative dielectric constant of BST thin film is 1,097 at 6 GHz. The tunable SIR bandpass filter using BST thin films is designated with coupling section of 22° and tapped feeding and has been successfully demonstrated with the thickness of BST thin films of 500 nm on the MgO substrate. The center frequency of the tunable SIR bandpass filter is moved from 6.15 GHz to 6.29 GHz at 50 V bias with about 3% bandwidth.