This paper extends the range of applications for Microwave Energy to create a plasma source based on the resonance phenomenon and operated at atmospheric pressure. The atmospheric-pressure process is advantageous for plasma-assisted coating deposition and plasma surface treatment. The novel Microwave Resonance Plasma Torch (MRPT) using the tunable TM{sub}(013) mode cylindrical resonant cavity and working at 2.45 GHz was tested for surface engineering applications. The MRPT was successfully approved with different carrier gases N{sub}2, Ar, He) for creation of thermal plasma. The feasibility of using the Microwave Resonance Plasma Torch for nitriding/oxinitriding of Ti, 304 and 316 stainless steel, and 5140 steel with pure N{sub}2 and with air (the mixture of N{sub}2 78 vol % + O{sub}2 21 vol %) was confirmed.
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